Investigation on grown-in defects in CZ-Si crystal under...

Journal of Crystal Growth 2000 Vol. 210; Iss. 1-3

Investigation on grown-in defects in CZ-Si crystal under slow pulling rate

Jun Furukawa, Hideo Tanaka, Yuji Nakada, Naoki Ono, Hiroyuki Shiraki
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Volume:
210
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0022-0248(99)00640-5
File:
PDF, 463 KB
english, 2000
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