Application of the narrow spectral range InAs-FPA-based IR...

Journal of Crystal Growth 2000 Vol. 210; Iss. 1-3

Application of the narrow spectral range InAs-FPA-based IR camera for the investigation of the interface voids in silicon wafer bonding

B.G Vainer, G.N Kamaev, G.L Kurishev
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Volume:
210
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0022-0248(99)00709-5
File:
PDF, 621 KB
english, 2000
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