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An investigation of hardness and adhesion of sputter-deposited aluminum on silicon by utilizing a continuous indentation test
Stone, D., LaFontaine, W. R., Alexopoulos, P., Wu, T. -W., Li, Che-YuVolume:
3
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.1988.0141
Date:
February, 1988
File:
PDF, 704 KB
english, 1988