![](/img/cover-not-exists.png)
Residual stress measurements of thin aluminum metallizations by continuous indentation and x-ray stress measurement techniques
LaFontaine, W.R., Paszkiet, C.A., Korhonen, M.A., Li, Che-YuVolume:
6
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.1991.2084
Date:
October, 1991
File:
PDF, 564 KB
english, 1991