A study of the effect of composition on the microstructural...

Journal of Materials Research 1992 / 9 Vol. 7; Iss. 9

A study of the effect of composition on the microstructural evolution of a–Si xC1− x: H PECVD films: IR absorption and XPS characterizations

Gat, E., El Khakani, M.A., Chaker, M., Jean, A., Boily, S., Pépin, H., Kieffer, J.C., Durand, J., Cros, B., Rousseaux, F., Gujrathi, S.
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Volume:
7
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.1992.2478
Date:
September, 1992
File:
PDF, 992 KB
english, 1992
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