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A mechanism of CVD diamond film growth deduced from the sequential deposition from sputtered carbon and atomic hydrogen
Olson, Darin S., Kelly, Michael A., Kapoor, Sanjiv, Hagstrom, Stig B.Volume:
9
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.1994.1546
Date:
June, 1994
File:
PDF, 584 KB
english, 1994