Analysis of nitride films on silicon substrates by ion beam...

Journal of Materials Research 1995 / 12 Vol. 10; Iss. 12

Analysis of nitride films on silicon substrates by ion beam methods

Zheng, Z.S., Liu, J.R., Cui, X.T., Chu, W.K., Rangarajan, S.P., Hoffman, D.M.
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Volume:
10
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.1995.3124
Date:
December, 1995
File:
PDF, 419 KB
english, 1995
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