Bisethylacetoacetato Cu(II) as a novel metal-organic...

Bisethylacetoacetato Cu(II) as a novel metal-organic precursor for Cu film production by plasma-enhanced chemical vapor deposition toward ultra-large-scale integration metallization

Hwang, Soon T., Shim, Ilwun, Lee, Kyung O., Kim, Kyeong S., Kim, Ju H., Choi, Guang J., Cho, Young S., Choi, Hyungsoo
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Volume:
11
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.1996.0131
Date:
May, 1996
File:
PDF, 470 KB
english, 1996
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