Excimer laser deposition of c-axis oriented Pb(Zr, Ti)O3...

Journal of Materials Research 1997 / 5 Vol. 12; Iss. 5

Excimer laser deposition of c-axis oriented Pb(Zr, Ti)O3 thin films on silicon substrates with direct-current glow discharge

Zheng, Lirong, Hu, Xuhong, Yang, Pingxiong, Xu, W-ping, Lin, Chenglu
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Volume:
12
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.1997.0164
Date:
May, 1997
File:
PDF, 179 KB
english, 1997
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