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Annealing induced interdiffusion and crystallization in sputtered amorphous Si/Ge multilayers
Czigány, Zs., Radnóczi, G., Järrendahl, K., Sundgren, J-E.Volume:
12
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.1997.0301
Date:
September, 1997
File:
PDF, 385 KB
english, 1997