Rapid thermal recrystallization of amorphous silicon films

Journal of Materials Research 1997 / 10 Vol. 12; Iss. 10

Rapid thermal recrystallization of amorphous silicon films

Beshkov, G. D., Dimitrov, D. B., Lazarova, V., Koprinarova, J., Gesheva, K., Vlaev, E.
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Volume:
12
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.1997.0331
Date:
October, 1997
File:
PDF, 359 KB
english, 1997
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