Fabrication of on-chip barium strontium titanate capacitors...

Journal of Materials Research 1998 / 6 Vol. 13; Iss. 6

Fabrication of on-chip barium strontium titanate capacitors by metallo-organic decomposition

Catalan, Antonio B., Chang, Shih-Chia, Poisson, Roger J., Baney, William J., Benci, John E.
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Volume:
13
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.1998.0215
Date:
June, 1998
File:
PDF, 242 KB
english, 1998
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