Synthesis of silicon-based polymerized films by excimer...

Journal of Materials Research 1999 / 1 Vol. 14; Iss. 1

Synthesis of silicon-based polymerized films by excimer laser ablation deposition of hexaphenyldisilane

Zeng, Xiaoyan, Rossignol, Fabrice, Konno, Shigeru, Nagai, Hideaki, Nakata, Yoshinori, Okutani, Takeshi, Suzuki, Masaaki
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Volume:
14
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.1999.0035
Date:
January, 1999
File:
PDF, 674 KB
english, 1999
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