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Structure and chemical characteristics of tin oxide films prepared by reactive-ion-assisted deposition as a function of oxygen ion beam energy
Song, Seok-Kyun, Kim, Daeil, Kim, Steven, Koh, Seok-Keun, Jung, Hyung-Jin, Lee, Jeong-Young, Baik, Hong-KooVolume:
15
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2000.0277
Date:
September, 2000
File:
PDF, 843 KB
english, 2000