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Modification of sol–gel-derived amorphous Al2O3 thin films by F2 excimer laser irradiation at ambient temperature
Takeda, Satoshi, Ikuta, Yoshiaki, Hirano, Masahiro, Hosono, HideoVolume:
16
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2001.0141
Date:
April, 2001
File:
PDF, 529 KB
english, 2001