Optimization of the annealing process for the (Ba,Sr)TiO3 thin films grown by low-temperature (420 °C) metalorganic chemical vapor deposition
Park, Jaehoo, Hwang, Cheol Seong, Yang, Doo YoungVolume:
16
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2001.0191
Date:
May, 2001
File:
PDF, 557 KB
english, 2001