Stress Relaxation of a Patterned Microstructure on a...

Journal of Materials Research 2002 / 7 Vol. 17; Iss. 7

Stress Relaxation of a Patterned Microstructure on a Diaphragm

Zheng, D. W., Wang, X. H., Shyu, K., Chen, C., Chang, C-T., Tu, K. N., Mal, A. K., Guo, Y. F.
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Volume:
17
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2002.0266
Date:
July, 2002
File:
PDF, 358 KB
english, 2002
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