Ultrathin HfO2 gate dielectric grown by plasma-enhanced...

Ultrathin HfO2 gate dielectric grown by plasma-enhanced chemical vapor deposition using Hf[OC(CH3)3]4 as a precursor in the absence of O2

Choi, Kyu-Jeong, Shin, Woong-Chul, Yoon, Soon-Gil
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Volume:
18
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2003.0009
Date:
January, 2003
File:
PDF, 262 KB
english, 2003
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