![](/img/cover-not-exists.png)
Effects of nitrogen flow rates on reactively sputtered nanocrystal-(Ti,Al) xN1- x/amorphous-Si yN1- y nanolaminate films
Yau, Bao-Shun, Huang, Jow-Lay, Lii, Ding-FwuVolume:
19
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2004.0287
Date:
August, 2004
File:
PDF, 2.44 MB
english, 2004