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Chemical-mechanical Polishing of Copper Using Molybdenum Dioxide Slurry
Hegde, Sharath, Patri, Udaya B., Babu, S.V.Volume:
20
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2005.0305
Date:
September, 2005
File:
PDF, 641 KB
english, 2005