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Extent of plasma damage to porous organosilicate films characterized with nanoindentation, x-ray reflectivity, and surface acoustic waves
Iacopi, F., Travaly, Y., Van Hove, M., Jonas, A.M., Molina-Aldareguia, J.M., Elizalde, M.R., Ocaña, I.Volume:
21
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2006.0386
Date:
December, 2006
File:
PDF, 259 KB
english, 2006