Nanomechanical properties of sub-10 nm carbon film overcoats using the nanoindentation technique
Yeo, Chang-Dong, Polycarpou, Andreas A., Kiely, James D., Hsia, Yiao-TeeVolume:
22
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2007.0007
Date:
January, 2007
File:
PDF, 407 KB
english, 2007