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Study of Ru barrier failure in the Cu/Ru/Si system
Damayanti, M., Sritharan, T., Mhaisalkar, S.G., Phoon, E., Chan, L.Volume:
22
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2007.0310
Date:
September, 2007
File:
PDF, 402 KB
english, 2007