Effects of HfO2 buffer layer thickness on the properties of...

Effects of HfO2 buffer layer thickness on the properties of Pt/SrBi2Ta2O9/HfO2/Si structure

Leu, Ching-Chich, Lin, Chen-Han, Chien, Chao-Hsin, Yang, Ming-Jui
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Volume:
23
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2008.0248
Date:
July, 2008
File:
PDF, 1.44 MB
english, 2008
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