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Annealing behaviors of structural, interfacial and optical properties of HfO2 thin films prepared by plasma assisted reactive pulsed laser deposition
Ying, Zhifeng, Tang, Wentao, Hu, Zhigao, Li, Wenwu, Sun, Jian, Xu, Ning, Wu, JiadaVolume:
25
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2010.0087
Date:
April, 2010
File:
PDF, 859 KB
english, 2010