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Stress nature investigation on heteroepitaxial 3C–SiC film on (100) Si substrates
Anzalone, Ruggero, Camarda, Massimo, Locke, Christopher, Carballo, Josè, Piluso, Nicolò, La Magna, Antonino, Volinsky, Alex A., Saddow, Stephen E., La Via, FrancescoVolume:
28
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2012.224
Date:
January, 2013
File:
PDF, 529 KB
english, 2013