Piezoelectric PZT MEMS technologies for small-scale...

MRS Bulletin 2012 / 11 Vol. 37; Iss. 11

Piezoelectric PZT MEMS technologies for small-scale robotics and RF applications

Pulskamp, Jeffrey S., Polcawich, Ronald G., Rudy, Ryan Q., Bedair, Sarah S., Proie, Robert M., Ivanov, Tony, Smith, Gabriel L.
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Volume:
37
Language:
english
Journal:
MRS Bulletin
DOI:
10.1557/mrs.2012.269
Date:
November, 2012
File:
PDF, 1.22 MB
english, 2012
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