XTEM characterization of modulated ion implantation through...

MRS Proceedings 2012 / 1 Vol. 1411

XTEM characterization of modulated ion implantation through self-organized anodic aluminum oxide (AAO) membranes

Guan, Wei, Ghatak, Jay, Peng, Nianhua, Peng, Yong, Jeynes, Chris, Möbus, Günter
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Volume:
1411
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2012.757
Date:
January, 2012
File:
PDF, 2.86 MB
english, 2012
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