Effect of RF or VHF Plasma on Nanocrystalline Silicon Thin Film Structure: Insight from OES and Langmuir Probe Measurements
Zhu, Lala, Das, Ujjwal K, Hegedus, Steven S, Birkmire, Robert WVolume:
1536
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2013.924
Date:
January, 2013
File:
PDF, 378 KB
english, 2013