Strain measurements in s-Si/SiGe nanostructures by quantitative high-resolution electron microscopy
Hüe, Florian, Hÿtch, Martin, Bender, Hugo, Hartmann, Jean-Michel, Claverie, AlainVolume:
1026
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-1026-c20-04
Date:
January, 2007
File:
PDF, 5.28 MB
english, 2007