Role of Boron TED and Series Resistance in SiGe/Si Heterojunction pMOSFETs
Kim, Yonghyun, Kang, Chang Yong, Lee, Se-Hoon, Majhi, Prashant, Min, Byoung-Gi, Lee, Ki-Seung, Ahn, Donghwan, Banerjee, Sanjay K.Volume:
1155
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-1155-c02-05
Date:
January, 2009
File:
PDF, 250 KB
english, 2009