Novel Zirconium Formamidinate Precursor for the ALD of ZrO2

MRS Proceedings 2009 / 1 Vol. 1194

Novel Zirconium Formamidinate Precursor for the ALD of ZrO2

Li, Huazhi, Shenai, Deo V, Lehn, Jean-Sebastien
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Volume:
1194
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-1194-a05-10
Date:
January, 2009
File:
PDF, 75 KB
english, 2009
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