Large Batch Etching of Gallium Nitride Using Inductively Coupled Plasma Tools as a Production Solution
Ren, Zhong, Dineen, Mark, Deng, Ligang, Goodyear, Andrew L., Gunn, RobertVolume:
1195
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-1195-b03-06
Date:
January, 2009
File:
PDF, 1.07 MB
english, 2009