The Tunability in Mechanical Properties and Fracture Toughness of Sputtered Silicon Oxynitride Thin Films for MEMS-based Infrared Detectors
Lin, I-Kuan, Wu, Ping-Hsin, Ou, Kuang-Shun, Chen, Kuo-Shen, Zhang, XinVolume:
1222
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-1222-dd02-20
Date:
January, 2009
File:
PDF, 447 KB
english, 2009