The Tunability in Mechanical Properties and Fracture...

The Tunability in Mechanical Properties and Fracture Toughness of Sputtered Silicon Oxynitride Thin Films for MEMS-based Infrared Detectors

Lin, I-Kuan, Wu, Ping-Hsin, Ou, Kuang-Shun, Chen, Kuo-Shen, Zhang, Xin
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Volume:
1222
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-1222-dd02-20
Date:
January, 2009
File:
PDF, 447 KB
english, 2009
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