A Thermodynamic Model for the Laser Fluence Ablation...

MRS Proceedings 2010 / 1 Vol. 1245

A Thermodynamic Model for the Laser Fluence Ablation Threshold of PECVD SiO2 on Thin a-Si:H Films Deposited on Crystalline Silicon

Mangersnes, Krister, Foss, Sean Erik
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Volume:
1245
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-1245-a16-02
Date:
January, 2010
File:
PDF, 357 KB
english, 2010
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