Gate Overlapped Lightly Doped Drain Poly-Si TFTs Employing...

Gate Overlapped Lightly Doped Drain Poly-Si TFTs Employing 45° Tilt Implant For Source and Drain

Lee, Jae-Hoon, Shin, Moon-Young, Shin, Heesun, Nam, Woo-Jin, Han, Min-Koo
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Volume:
808
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-808-a4.1
Date:
January, 2004
File:
PDF, 171 KB
english, 2004
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