Study of Ge Out-diffusion During Nickel (Platinum ∼ 0, 5, 10 at.%) Germanosilicide Formation
Jin, L. J., Pey, K. L., Choi, W. K., Fitzgerald, E. A., Antoniadis, D. A., Pitera, A. J., Lee, M. L., Chi, D. Z.Volume:
810
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-810-c4.3
Date:
January, 2004
File:
PDF, 363 KB
english, 2004