Alkyl monolayers on Si(111) as ultrathin electron-beam patterning media
Taro Yamada, Nao Takano, Keiko Yamada, Shuhei Yoshitomi, Tomoyuki Inoue, Tetsuya OsakaVolume:
532
Year:
2002
Language:
english
Pages:
8
DOI:
10.1016/s0022-0728(02)00865-3
File:
PDF, 318 KB
english, 2002