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Survey of the metal nucleation processes on silicon surfaces in fluoride solutions: from dilute HF to concentrated NH4F solutions
Marius Chemla, Takayuki Homma, Valerie Bertagna, Rene Erre, Nobuhiro Kubo, Tetsuya OsakaVolume:
559
Year:
2003
Language:
english
Pages:
13
DOI:
10.1016/s0022-0728(02)01280-9
File:
PDF, 1.27 MB
english, 2003