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Thin film deposition of Mo and Mo-compounds by PECVD from Mo(CO)6 and MoF6 as precursors: characterization of films and thermodynamic analysis
Gianfranco Di Giuseppe, J.Robert SelmanVolume:
559
Year:
2003
Language:
english
Pages:
13
DOI:
10.1016/s0022-0728(03)00392-9
File:
PDF, 797 KB
english, 2003