Optimization of diode pumped solid state ultraviolet laser...

Optimization of diode pumped solid state ultraviolet laser dicing of silicon carbide chips using design of experiment methodology

Savriama, Guillaume, Baillet, Francis, Barreau, Laurent, Boulmer-Leborgne, Chantal, Semmar, Nadjib
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Volume:
27
Language:
english
Journal:
Journal of Laser Applications
DOI:
10.2351/1.4919886
Date:
August, 2015
File:
PDF, 1.96 MB
english, 2015
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