Optimization of diode pumped solid state ultraviolet laser dicing of silicon carbide chips using design of experiment methodology
Savriama, Guillaume, Baillet, Francis, Barreau, Laurent, Boulmer-Leborgne, Chantal, Semmar, NadjibVolume:
27
Language:
english
Journal:
Journal of Laser Applications
DOI:
10.2351/1.4919886
Date:
August, 2015
File:
PDF, 1.96 MB
english, 2015