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Crystallization of a-Si films with smooth surfaces by using Blue Multi-Laser Diode Annealing
Okada, Tatsuya, Sugihara, Kouya, Chinen, Satoshi, Noguchi, TakashiVolume:
66
Language:
english
Journal:
Journal of the Korean Physical Society
DOI:
10.3938/jkps.66.1265
Date:
April, 2015
File:
PDF, 1.34 MB
english, 2015