Single Discharge of Dry µ-EDM on Silicon: Crater and Plasma Temperature Measurement
Kanmani Subbu, S., Ramkumar, Janakarajan, Dhamodaran, S.Volume:
299-300
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.299-300.1334
Date:
July, 2011
File:
PDF, 352 KB
english, 2011