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Analysis of Wet Etching Characteristics of a-IGZO Thin Film
Chen, Long Long, Li, Xi Feng, Shi, Ji Feng, Zhang, Hao, Li, Chun Ya, Zhang, Jian HuaVolume:
476-478
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.476-478.2339
Date:
February, 2012
File:
PDF, 864 KB
english, 2012