Influence of Deposition Time on Amorphous Carbon Thin Films...

Advanced Materials Research 2013 / 11 Vol. 832

Influence of Deposition Time on Amorphous Carbon Thin Films Performance with Aerosol-Assisted Chemical Vapor Deposition

Fadzilah, A.N., Kamaruzaman, Dayana, Siran, Yosri M., Syahril Anuar, M. Rejab, Asis, Ahmad Jaril, Syawaluddin, Tahirruddin, Mahmood, Mohamad Rusop
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Volume:
832
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.832.712
Date:
November, 2013
File:
PDF, 388 KB
english, 2013
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