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MEMS Rotational Actuator for High Force and Large Displacement
Currano, Luke J., Gee, Danny, Churaman, Wayne A., Dubey, Madan, Amirtharaj, Paul, Yu, Miao, Balachandran, BalakumarVolume:
54
Year:
2008
Language:
english
Journal:
Advances in Science and Technology
DOI:
10.4028/www.scientific.net/ast.54.372
File:
PDF, 418 KB
english, 2008