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Quantum Size Effects in a Si:H Films Prepared by PECVD with Different Hydrogen-Diluted Silane
Prušaková, Lucie, Vavruňková, V., Netrvalová, M., Müllerová, J., Šutta, P.Volume:
74
Language:
english
Journal:
Advances in Science and Technology
DOI:
10.4028/www.scientific.net/ast.74.137
Date:
October, 2010
File:
PDF, 688 KB
english, 2010