Microstructural Differences in Silicon Nitrides with and without a Small Amount of TiN Additive
Duan, Ren-Guan, Roebben, Gert, Sarbu, C., Vleugels, Jozef, Van der Biest, OmerVolume:
206-213
Year:
2002
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.206-213.1181
File:
PDF, 311 KB
2002