First-Principles Study of Reaction Process of SiC and HF...

Key Engineering Materials 2012 / 11 Vol. 523-524

First-Principles Study of Reaction Process of SiC and HF Molecules in Catalyst-Referred Etching

Bui, Pho Van, Inagaki, Kouji, Sano, Yasuhisa, Yamauchi, Kazuto, Morikawa, Yoshitada
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Volume:
523-524
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.523-524.173
Date:
November, 2012
File:
PDF, 1.15 MB
english, 2012
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