Modelling and Optimization of DLC Film Thickness Variation...

Key Engineering Materials 2013 / 5 Vol. 552

Modelling and Optimization of DLC Film Thickness Variation for PECVD Processes

Li, Zhuo Lin, Fu, Xiu Hua, Lu, Jing, Yang, Yong Liang, Sun, De Gui
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Volume:
552
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.552.214
Date:
May, 2013
File:
PDF, 2.63 MB
english, 2013
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